Fundamental research on the generation of low energy electrons and their interaction with molecules and thin films towards applications for patterning and imaging.

Specifically, the generation of low energy electrons induced in matter by electron beam, photon beam, ion beam or atom beam, the absorption/transmission through matter, the electron mean free path, the sample/photoresists/stack interactions and charging and damage mechanisms, related characterization techniques (photoemission, total electron yield, residual gas analysis, tomography, mass spectrometry, electron / infrared spectroscopy.

Patterning and imaging of materials both at small scale and at high volume manufacturing: focused e-beam induced processing (FEBIP), electron beam lithography (EBL), extreme ultraviolet lithography (EUVL), ion/atom beam lithography, X-ray lithography, low-energy electron microscopy (LEEM), low-voltage (scanning) electron microscopy.